Mathematical programming approaches for the manufacturing of vias using DSA technology

Minimizing the cost of manufacturing of integrated circuits is an important problem in the semiconductor industry. In our study, we focus on the manufacturing of some specific components called vias which are used as electrical connections between components (transistors). The corresponding manufacturing problem can be modelled as a generalization of the standard coloring problem. We will present two different mathematical programming approaches to this problem, a mixed integer programming approach and a dynamic programming approach, and we will report some preliminary results.